Hydrogen Sensor, Micro ElectroMechanical System, Nano Technoloty, Interdigitated Electrodes
Hydrogen sensors have obtained increased interest with the widened application of hydrogen energy in recent years. Among them, various chemiresistor based hydrogen sensors have been studied due to their relatively simple structure and well-established detection mechanism. The recent progress in micro/nanotechnology has accelerated the development of small-scale chemical sensors. In this work, MEMS (Micro-Electro-Mechanical Systems) sensor platforms with interdigitated electrodes have been designed and fabricated. Integrating indium doped tin dioxide nanoparticles, these hydrogen sensors showed improved sensor characteristics such as sensitivity, response and selectivity at room temperature. Design parameters of interdigitated electrodes have been studied in association with sensor characteristics. It was observed that these parameters (gap between the electrodes, width and length of the fingers, and the number of the fingers) imposed different impacts on the sensor performance. In order to achieve small, robust, low cost and fast hydrogen micro/nano sensors with high sensitivity and selectivity, the modeling and process optimization was performed. The effect of humidity and the influence of the applied voltage were also studied. The sensor could be tuned to have high sensitivity (105), fast response time (10 seconds) and low energy consumption (19 nW). Finally, a portable hydrogen instrument integrated with a micro sensor, display, sound warning system, and measurement circuitry was fabricated based on the calibration data of the sensor.
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Doctor of Philosophy (Ph.D.)
College of Engineering and Computer Science
Mechanical, Materials and Aerospace Engineering
Length of Campus-only Access
Doctoral Dissertation (Open Access)
Zhang, Peng, "Design And Fabrication Of Chemiresistor Typemicro/nano Hydrogen Gas Sensors Usinginterdigitated Electrodes" (2008). Electronic Theses and Dissertations. 3705.