Lipon; ionic conductivity; deposition temperature; substrate bias; xps; icp/oes
Lithium phosphorus oxy-nitride (LiPON) thin films are widely studied and used as a thin film electrolyte for lithium ion battery applications. LiPON thin films may be prepared by many techniques, but RF sputter deposition is most frequently used and was investigated in this dissertation, in spite of its low deposition rate, because of it offers more reliable and controllable processing. This dissertation includes the methodologies of sputter deposition and materials characterization of the LiPON thin film electrolytes. The LiPON thin films were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied. The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization.
Doctor of Philosophy (Ph.D.)
College of Engineering and Computer Science
Materials Science Engineering
Engineering and Computer Science
Length of Campus-only Access
Doctoral Dissertation (Open Access)
Dissertations, Academic -- Engineering and Computer Science; Engineering and Computer Science -- Dissertations, Academic
Mani, Prabhu Doss, "Reactive Sputter Deposition of Lithium Phosphorus Oxynitride Thin Films, A Li Battery Solid State Electrolyte" (2015). Electronic Theses and Dissertations. 693.