Title

Fabrication Of Saw 3-Phase Unidirectional Transducers Using Dielectric Crossovers

Title - Alternative

Electron. Lett.

Keywords

Surface Acoustic Wave Devices; Ultrasonics; Engineering, Electrical & Electronic

Abstract

Two common dielectrics used for isolation in semiconductor device fabrication, spin on glass (SOG) and polyimide, are evaluated for the fabrication of dielectric supported crossover interconnections for surface acoustic wave (SAW) devices employing three-phase unidirectional transducers (TPUDTs). An all-aluminium reliable fabrication process was developed using polyimide.

Publication Title

Electronics Letters

Volume

29

Issue/Number

9

Publication Date

1-1-1993

Document Type

Article

Language

English

First Page

801

Last Page

802

WOS Identifier

WOS:A1993LN17600047

ISSN

0013-5194

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