Title

Characterization And Optimization Of Cerium Dioxide Films Deposited By Rf Magnetron Sputtering

Title - Alternative

Thin Solid Films

Keywords

Thin-Films; Materials Science, Multidisciplinary; Materials Science, Coatings &; Films; Physics, Applied; Physics, Condensed Matter

Abstract

Cerium dioxide (CeO2) films were deposited on glass substrates by an r.f. magnetron sputtering process. The deposition rates were studied as a function of the molar fraction of oxygen in the system for various input power levels. The deposition conditions were optimized to obtain good quality films for optical transmission.

Publication Title

Thin Solid Films

Volume

221

Issue/Number

1-2

Publication Date

1-1-1992

Document Type

Article

Language

English

First Page

13

Last Page

16

WOS Identifier

WOS:A1992KD61100004

ISSN

0040-6090

Share

COinS