Title

Cerium Dioxide Thin-Film Optical Wave-Guides

Title - Alternative

Opt. Laser Technol.

Keywords

Optical Wave-Guides; Thin Films; Ceo2; Sapphire; Optics; Physics, Applied

Abstract

Cerium dioxide thin film optical waveguides were fabricated by an RF magnetron sputtering process. The films were deposited on glass substrates and on silicon dioxide layers grown on silicon substrates. Optical loss measurements for the fabricated waveguides are reported. It is seen that the volume losses in the films were fairly high compared with the surface losses.

Publication Title

Optics and Laser Technology

Volume

24

Issue/Number

5

Publication Date

1-1-1992

Document Type

Article

Language

English

First Page

263

Last Page

266

WOS Identifier

WOS:A1992JX09900003

ISSN

0030-3992

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