Title

Investigation Of Distortion And Damage Of Molybdenum Silicon Multilayer Reflective Coatings With High-Intensity Ultraviolet-Radiation

Title - Alternative

Appl. Optics

Keywords

Amorphous-Silicon; Laser; Optics

Abstract

Studies are performed to determine an upper limit on the optical damage threshold of a soft-x-ray molybdenum-silicon multilayer reflective coating by the use of a 308-nm, 15-ns pulse from a Xe-Cl excimer laser in order to simulate the potential damage induced by the x-ray flux from a pulsed laser-produced plasma. Experimental results yield a value of 0.26 J/cm2 to produce visible signs of damage as determined by optical microscopy. Experiments are conducted first on silicon, as a reference point of a bulk material, and then applied to molybdenum-silicon in an effort to facilitate a theoretical comparison between a simple and a more complicated material. Theoretical predictions are in reasonable agreement with experimental results, but suggest that a lower value of 0.085 J/cm2 might cause significant thermal-induced damage.

Publication Title

Applied Optics

Volume

32

Issue/Number

34

Publication Date

1-1-1993

Document Type

Article

Language

English

First Page

6999

Last Page

7006

WOS Identifier

WOS:A1993MM44500018

ISSN

0003-6935

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