Title

Introduction To Special Issue Of Applied Optics On Soft-X-Ray Projection Lithography

Title - Alternative

Appl. Optics

Keywords

Optics

Abstract

This special issue contains a collection of papers describing results that were presented at the Second Topical Meeting on Soft-X-Ray Projection Lithography sponsored by the Optical Society of America and held 6-8 April 1992 in Monterey, California, along with several additional papers submitted after that meeting. These papers are being published in this collection to make them readily available to a larger audience than would normally occur with a proceedings and also to take advantage of the critical review process.

Publication Title

Applied Optics

Volume

32

Issue/Number

34

Publication Date

1-1-1993

Document Type

Article

Language

English

First Page

6895

Last Page

6896

WOS Identifier

WOS:A1993MM44500001

ISSN

0003-6935

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