Title

Soft-X-Ray Projection Imaging with a 1/1 Ring-field Optic

Keywords

Features; system; Optics

Abstract

A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-mum features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 mum, probably because of the presence of substrate figuring errors.

Publication Title

Applied Optics

Volume

32

Issue/Number

34

Publication Date

1-1-1993

Document Type

Article

WOS Identifier

WOS:A1993MM44500030

ISSN

0003-6935

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