Title

Microstructure Analysis Of Thin-Films Deposited By Reactive Evaporation And By Reactive Ion Plating

Authors

Authors

K. H. Guenther; B. Loo; D. Burns; J. Edgell; D. Windham;K. H. Muller

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

J. Vac. Sci. Technol. A-Vac. Surf. Films

Keywords

Materials Science, Coatings & Films; Physics, Applied

Journal Title

Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films

Volume

7

Issue/Number

3

Publication Date

1-1-1989

Document Type

Article

Language

English

First Page

1436

Last Page

1445

WOS Identifier

WOS:A1989U715300163

ISSN

0734-2101

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