Soft-X-Ray Projection Imaging with a 1/1 Ring-field Optic
Features; system; Optics
A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-mum features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 mum, probably because of the presence of substrate figuring errors.
"Soft-X-Ray Projection Imaging with a 1/1 Ring-field Optic" (1993). Faculty Bibliography 1990s. 844.