Title

Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate

Authors

Authors

J. S. Tharp; D. J. Shelton; S. L. Wadsworth;G. D. Boreman

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

J. Vac. Sci. Technol. B

Keywords

Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Journal Title

Journal of Vacuum Science & Technology B

Volume

26

Issue/Number

5

Publication Date

1-1-2008

Document Type

Editorial Material

Language

English

First Page

1821

Last Page

1823

WOS Identifier

WOS:000259874900035

ISSN

1071-1023

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