Title

Beat the diffraction limit in 3D direct laser writing in photosensitive glass

Authors

Authors

M. Bellec; A. Royon; B. Bousquet; K. Bourhis; M. Treguer; T. Cardinal; M. Richardson;L. Canioni

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Opt. Express

Keywords

INFRARED FEMTOSECOND LASER; TRANSPARENT MATERIALS; PHOSPHATE-GLASSES; WAVE-GUIDES; NANOCLUSTERS; DIELECTRICS; IONIZATION; GENERATION; CLUSTERS; STORAGE; Optics

Abstract

Three-dimensional (3D) femtosecond laser direct structuring in transparent materials is widely used for photonic applications. However, the structure size is limited by the optical diffraction. Here we report on a direct laser writing technique that produces subwavelength nanostructures independently of the experimental limiting factors. We demonstrate 3D nanostructures of arbitrary patterns with feature sizes down to 80 nm, less than one tenth of the laser processing wavelength. Its ease of implementation for novel nanostructuring, with its accompanying high precision will open new opportunities for the fabrication of nanostructures for plasmonic and photonic devices and for applications in metamaterials. (c) 2009 Optical Society of America

Journal Title

Optics Express

Volume

17

Issue/Number

12

Publication Date

1-1-2009

Document Type

Article

Language

English

First Page

10304

Last Page

10318

WOS Identifier

WOS:000266906400084

ISSN

1094-4087

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