A < 100 > direction front-etched membrane structure for a micro-bolometer
In this work, a CMOS-compatible membrane-supported micro-bolometer with a front-etched design along the < 110 > direction is fabricated. The openings in the absorbing area make etching faster on (100) planes and form a perfect suspending structure. The experiment shows that the design of < 100 >-oriented windows in an IR absorbing area together with a thermal sensitive thin film results in short releasing time and good IR absorption. The typical measured responsivity and detectivity of such a bolometer are 8.685 x 10(3) V W(-1) and 2.451 x 10(8) cm Hz(1/2) W(-1), respectively. The easy and fast fabrication design makes this structure very suitable for low cost, high performance applications.
Journal of Micromechanics and Microengineering
"A < 100 > direction front-etched membrane structure for a micro-bolometer" (2009). Faculty Bibliography 2000s. 1848.