Microlens fabrication using an etched glass master
Abbreviated Journal Title
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied
This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C4F8 plasma to form a conformal anti-adhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses.
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
Article; Proceedings Paper
"Microlens fabrication using an etched glass master" (2007). Faculty Bibliography 2000s. 21.