High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm
Abbreviated Journal Title
LITHOGRAPHY; IONS; Optics
We describe a high-temperature lithium extreme-ultraviolet (EW) source based on a capillary discharge configuration that was developed for operating with metal vapors. The source produces narrow-band emission at 13.5 nm in the EUV spectral region, with emission intensity proportional to the lithium-vapor density. At an operating temperature of 725 degrees C, our measurements showed that, on axis, the source generated approximately 0.2 (mJ/2 pi sr)/pulse at 13.5 nm. (C) 2000 Optical Society of America.
"High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm" (2000). Faculty Bibliography 2000s. 2648.