Title

Advanced sample preparation techniques for SIMS analysis of semiconductor materials

Authors

Authors

F. A. Stevie; T. L. Shofner; F. Hillion; H. Francois-Saint-Cyr; T. Kimble; K. Elshot;K. A. Richardson

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Keywords

Instruments & Instrumentation; Microscopy; Physics, Multidisciplinary; Spectroscopy

Journal Title

Microbeam Analysis 2000, Proceedings

Issue/Number

165

Publication Date

1-1-2000

Document Type

Article

Language

English

First Page

325

Last Page

326

WOS Identifier

WOS:000166835400163

ISSN

0951-3248; 0-7503-0685-8

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