Physics of insulating specimen preparation for non-charging Auger electron spectroscopy
Abbreviated Journal Title
J. Phys. D-Appl. Phys.
FOCUSED ION-BEAM; SAMPLE PREPARATION; COMPENSATION; AES; Physics, Applied
Auger electron spectroscopy (AES) has the capability of providing compositional information with excellent spatial resolution. However, charging is known to be a major obstacle to the characterization of insulating materials. This paper discusses a novel technique using focused ion beam (FIB) for the preparation of thin specimens to overcome charging during AES analysis of insulating materials, A double layer model (DLM) was applied to calculate the 'effective thickness' of a Nextel-720 fibre/alumina ceramic matrix composite (CMC) for successful AES analysis with no charging compared to a relatively thick CMC sample. Similarly, the thickness for 50 industrially important solid oxides was calculated using our predictive method for non-charging AES analysis.
Journal of Physics D-Applied Physics
"Physics of insulating specimen preparation for non-charging Auger electron spectroscopy" (2001). Faculty Bibliography 2000s. 2993.