Design and fabrication of meso-scale variable capacitance motor for miniature heat pumps
Abbreviated Journal Title
J. Micromech. Microeng.
SIDE-DRIVE MOTORS; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
Miniaturization of the heat pump in the meso-scale power domain requires the development of the compressor integrated actuation units in the millimeter range. In this respect. a variable capacitance motor (VCM) is considered for compressor actuation. This work describes the design of a three-phase VCM. A microfabrication technique has been applied for the implementation of the motor using silicon technology. Some static electrical measurements have been conducted for the fabricated motor.
Journal of Micromechanics and Microengineering
"Design and fabrication of meso-scale variable capacitance motor for miniature heat pumps" (2003). Faculty Bibliography 2000s. 3584.