Title

Design and fabrication of meso-scale variable capacitance motor for miniature heat pumps

Authors

Authors

R. Agrawal; Q. Hasan; N. Ashraf; K. B. Sundaram; L. C. Chow; J. S. Kapat;J. Vaidya

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

J. Micromech. Microeng.

Keywords

SIDE-DRIVE MOTORS; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

Abstract

Miniaturization of the heat pump in the meso-scale power domain requires the development of the compressor integrated actuation units in the millimeter range. In this respect. a variable capacitance motor (VCM) is considered for compressor actuation. This work describes the design of a three-phase VCM. A microfabrication technique has been applied for the implementation of the motor using silicon technology. Some static electrical measurements have been conducted for the fabricated motor.

Journal Title

Journal of Micromechanics and Microengineering

Volume

13

Issue/Number

1

Publication Date

1-1-2003

Document Type

Article

DOI Link

http://dx.doi.org/10.1088/0960-1317/13/1/301

Language

English

First Page

1

Last Page

7

WOS Identifier

WOS:000180628400001

ISSN

0960-1317

Recommended Citation

"Design and fabrication of meso-scale variable capacitance motor for miniature heat pumps" (2003). Faculty Bibliography 2000s. 3584.
https://stars.library.ucf.edu/facultybib2000/3584