Title

Fabrication of air bridges using electron beam lithography

Authors

Authors

M. A. Gritz; M. Metzler; J. Moser; D. Spencer;G. D. Boreman

Abbreviated Journal Title

J. Vac. Sci. Technol. B

Keywords

Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Journal Title

Journal of Vacuum Science & Technology B

Volume

21

Issue/Number

1

Publication Date

1-1-2003

Document Type

Article

Language

English

First Page

332

Last Page

334

WOS Identifier

WOS:000182603900060

ISSN

1071-1023

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