Title

Fabrication of an infrared antenna-coupled microbolometer linear array using chrome as a mask

Authors

Authors

M. A. Gritz; I. Puscasu; D. Spencer;G. D. Boreman

Abbreviated Journal Title

J. Vac. Sci. Technol. B

Keywords

30 THZ RADIATION; NIO-NI DIODES; DIPOLE ANTENNAS; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Journal Title

Journal of Vacuum Science & Technology B

Volume

21

Issue/Number

6

Publication Date

1-1-2003

Document Type

Editorial Material

Language

English

First Page

2608

Last Page

2611

WOS Identifier

WOS:000188193600060

ISSN

1071-1023

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