Title

Micromachined nanocrystalline silver doped SnO2H2S sensor

Authors

Authors

J. W. Gong; Q. F. Chen; M. R. Lian; N. C. Liu; R. G. Stevenson;F. Adami

Comments

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Abbreviated Journal Title

Sens. Actuator B-Chem.

Keywords

MEMS; nanocrystalline SMO; sol-gel; tin dioxide; hydrogen sulfide; H2S SENSING PROPERTIES; THIN-FILM; GAS SENSOR; MECHANISM; Chemistry, Analytical; Electrochemistry; Instruments & Instrumentation

Abstract

An ultrahigh sensitive hydrogen sulfide gas sensor was developed utilizing micromachined nanocrystalline SnO2-Ag on ceramic wafer (alumina). A polymeric sol-gel process has been successfully developed in fabricating thin film SnO2-Ag nanocomposite, which shows excellent sensing characteristics upon exposure to H2S as low as 1 ppm at working temperature as low as 70 degrees C. This sensor also shows higher sensitivity to H2S under various humidity conditions, in comparing to commercialized H2S sensors as well as published data. The environmental influences on sensor's sensitivity and selectivity have been tested and discussed. The results show that the sensor has a good selectivity due to its less sensitive to common interference gases like Cl-2, HCl, SO2, C6H14, CH4, CO, C3H8, etc. (c) 2005 Elsevier B.V. All rights reserved.

Journal Title

Sensors and Actuators B-Chemical

Volume

114

Issue/Number

1

Publication Date

1-1-2006

Document Type

Article

Language

English

First Page

32

Last Page

39

WOS Identifier

WOS:000236009300005

ISSN

0925-4005

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