Shrinkage precompensation of holographic three-dimensional photonic-crystal templates
Abbreviated Journal Title
LASER INTERFERENCE; LITHOGRAPHY; FABRICATION; PHOTOFABRICATION; Chemistry, Multidisciplinary; Chemistry, Physical; Nanoscience &; Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter
Anisotropic shrinkage of holographic 3D photome crystals is quantified and precompensated by exposure to an appropriately spatially stretched interference pattern. The resulting simplecubic overall symmetry is validated by means of focused-ion-beam cuts (see figure), optical transmission measurements, and comparison with theory.
"Shrinkage precompensation of holographic three-dimensional photonic-crystal templates" (2006). Faculty Bibliography 2000s. 6429.