Title

Technique for thermal isolation of antenna-coupled infrared microbolometers

Authors

Authors

C. F. Middleton;G. D. Boreman

Comments

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Abbreviated Journal Title

J. Vac. Sci. Technol. B

Keywords

Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Abstract

A new method was developed to thermally isolate monolithic antenna-coupled infrared microbolometers from their substrate. Using a SiO2 sacrificial layer to create a 400 mn thick Si3N4 membrane, square spiral antennas coupled to Ni microbolometers were fabricated and tested. The responsivity of the thermally isolated devices is 164 times greater than a similar device that is not fabricated on a membrane. (c) 2006 American Vacuum Society.

Journal Title

Journal of Vacuum Science & Technology B

Volume

24

Issue/Number

5

Publication Date

1-1-2006

Document Type

Article

Language

English

First Page

2356

Last Page

2359

WOS Identifier

WOS:000241476500030

ISSN

1071-1023

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