Technique for thermal isolation of antenna-coupled infrared microbolometers
Abbreviated Journal Title
J. Vac. Sci. Technol. B
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
A new method was developed to thermally isolate monolithic antenna-coupled infrared microbolometers from their substrate. Using a SiO2 sacrificial layer to create a 400 mn thick Si3N4 membrane, square spiral antennas coupled to Ni microbolometers were fabricated and tested. The responsivity of the thermally isolated devices is 164 times greater than a similar device that is not fabricated on a membrane. (c) 2006 American Vacuum Society.
Journal of Vacuum Science & Technology B
"Technique for thermal isolation of antenna-coupled infrared microbolometers" (2006). Faculty Bibliography 2000s. 6435.