Title

Self-calibrating hybrid wavelength, polarization, and time-multiplexed heterodyne interferometers for Angstrom precision measurements

Authors

Authors

N. A. Riza; M. A. Arain;F. N. Ghauri

Comments

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Abbreviated Journal Title

Opt. Eng.

Keywords

acousto-optic deflectors; heterodyne optical interferometers; optical; sensors; scanning interferometers; SURFACE; PROFILE; SENSOR; Optics

Abstract

Propose here unique wavelength and hybrid wavelength-polarization and wavelength-polarization-time-multiplexed heterodyne optical interferometers using an internal self-referencing scheme enabling Angstrom level sensitivity optical path-length measurements. As a first step, a proof-of-concept wavelength multiplexed scanning heterodyne interferometer is built to test the surface quality of a test mirror, demonstrating +/- 100 angstrom profile variations with a 0.9 angstrom accuracy. The hybrid wavelength-polarization and wavelength-polarization-time-multiplexed interferometers can be used to form spectrally coded distributed sensors. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

Journal Title

Optical Engineering

Volume

45

Issue/Number

12

Publication Date

1-1-2006

Document Type

Article; Proceedings Paper

Language

English

First Page

6

WOS Identifier

WOS:000244064300031

ISSN

0091-3286

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