On-chip electrostatic discharge protection for CMOS gas sensor systems-on-a-chip (SoC)
Abbreviated Journal Title
ESD PROTECTION; SCR; VOLTAGE; DEVICES; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
An on-chip electrostatic discharge (ESD) protection scheme is demonstrated for an emerging technology of microelectromechanical systems (MEMS)-based embedded sensor (ES) system-on-a-chip (SoC). The ESD protection scheme is implemented using ground-referenced multifinger thyristor-type devices optimized for (1) the input/output (I/O) protection, (2) the power supply clamp, and (3) the internal sensors' electrodes during the micromachining process. The ESD structure developed demonstrates a leakage current below 10(-10) A, high on-state conductance, and high level of human body model (HBM) immunity. (c) 2006 Elsevier Ltd. All rights reserved.
Article; Proceedings Paper
"On-chip electrostatic discharge protection for CMOS gas sensor systems-on-a-chip (SoC)" (2006). Faculty Bibliography 2000s. 6533.