Focused-ion-beam fabrication of ZnO nanorod-based UV photodetector using the in-situ lift-out technique
ZnO nanorods and nanowires are promising candidates as new types of high-sensitivity ultraviolet (UV) photodetectors due to their wide bandgap and large aspect ratio. In this study, single-crystalline ZnO nanorods were grown on glass substrates by a hydrothermal method. Specific structural, morphological, electrical, and optical measurements were carried out. A single ZnO nanorod-based photodetector was fabricated using the in-situ lift-out technique in a focused ion beam (FIB/SEM) instrument and characterized. With a source wavelength of 370 nm and an applied bias of 1 V, the responsivity of the ZnO nancrod is 30 mA/W. The single ZnO nanorod photodetector exhibits an ultraviolet (UV) photoresponse promising for potential applications as cost-effective UV detectors. [GRAPHICS] Secondary electron images in the focused ion-beam system showing the steps of the in-situ lift-out fabrication procedure in the FIB/SEM instrument. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Physica Status Solidi a-Applications and Materials Science
"Focused-ion-beam fabrication of ZnO nanorod-based UV photodetector using the in-situ lift-out technique" (2008). Faculty Bibliography 2000s. 668.