Title

Electrode architecture in tuning room temperature sensing kinetics of nanomicrointegrated hydrogen sensor

Authors

Authors

S. Deshpande; S. Seal; P. Zhang; H. J. Cho;N. Posey

Comments

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Abbreviated Journal Title

Appl. Phys. Lett.

Keywords

OXIDE GAS SENSORS; THIN-FILM; TIN; CONDUCTION; INDIUM; MODEL; Physics, Applied

Abstract

A diffusion model is proposed for elucidating the effect of interelectrode distance modulation on conductance change of a nanomicrointegrated hydrogen sensor at room temperature. Both theoretical and experimental results showed a faster response upon exposure to hydrogen when sensor electrode gap was smaller. Also, a linear increase in the sensor sensitivity from 500 to 80 000 was observed on increasing the electrode spacing from 2 to 20 mu m. The improvement in sensitivity is attributed to the higher reactive sites available for the gaseous species to react on the sensor surface. (c) 2007 American Institute of Physics.

Journal Title

Applied Physics Letters

Volume

90

Issue/Number

7

Publication Date

1-1-2007

Document Type

Article

Language

English

First Page

3

WOS Identifier

WOS:000244249800076

ISSN

0003-6951

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