Electrostatically actuated 1 x 2 micromechanical optic switch
Abbreviated Journal Title
Engineering, Electrical & Electronic
A micro-opto-mechanical 1 x 2 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many; potential applications in fibre-optic local area networks.
"Electrostatically actuated 1 x 2 micromechanical optic switch" (2001). Faculty Bibliography 2000s. 8225.