Title

Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering

Authors

Authors

B. P. Shantheyanda; V. O. Todi; K. B. Sundaram; A. Vijayakumar;I. Oladeji

Comments

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Abbreviated Journal Title

J. Vac. Sci. Technol. A

Keywords

ZINC-OXIDE FILMS; CHEMICAL-VAPOR-DEPOSITION; TRANSPARENT CONDUCTING; FILMS; SOL-GEL PROCESS; STRUCTURAL-PROPERTIES; OPTICAL-PROPERTIES; TEMPERATURE; PLASMA; OXYGEN; TARGET; Materials Science, Coatings & Films; Physics, Applied

Abstract

Aluminum doped zinc oxide (AZO) thin films were obtained by RF magnetron sputtering. The effects of deposition parameters such as power, gas flow conditions, and substrate heating have been studied. Deposited and annealed films were characterized for composition as well as microstructure using x ray photoelectron spectroscopy and x ray diffraction. Films produced were polycrystalline in nature. Surface imaging and roughness studies were carried out using SEM and AFM, respectively. Columnar grain growth was predominantly observed. Optical and electrical properties were evaluated for transparent conducting oxide applications. Processing conditions were optimized to obtain highly transparent AZO films with a low resistivity value of 6.67 x 10(-4) Omega cm. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3624787]

Journal Title

Journal of Vacuum Science & Technology A

Volume

29

Issue/Number

5

Publication Date

1-1-2011

Document Type

Article

Language

English

First Page

9

WOS Identifier

WOS:000294482200029

ISSN

0734-2101

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