Abbreviated Journal Title
Appl. Phys. Lett.
Keywords
CERAMICS; TEMPERATURE; COMPOSITES; TRANSPORT; STRESS; MEMS; Physics, Applied
Abstract
A long-existing problem that the conductivity of amorphous silicon carbonitrides derived from polymeric precursor increases significantly with pyrolysis temperature is investigated. We show that the conductivity exhibited an Arrhenius dependence on pyrolysis temperature, with the activation energy of similar to 3.41 eV. Structural analysis using Raman spectroscopy reveals that the free carbon within the material undergoes a sp(3)-to-sp(2) transition as pyrolysis temperature increases, with the activation energy of similar to 3.6 eV. We conclude that the pyrolysis-temperature induced increase in the conductivity is mainly due to the increase in the conductivity of the free carbon. A simple model is proposed to correlate the two.
Journal Title
Applied Physics Letters
Volume
102
Issue/Number
23
Publication Date
1-1-2013
Document Type
Article
DOI Link
Language
English
First Page
4
WOS Identifier
ISSN
0003-6951
Recommended Citation
Chen, Yaohan; Yang, Fuqian; and An, Linan, "On electric conduction of amorphous silicon carbonitride derived from a polymeric precursor" (2013). Faculty Bibliography 2010s. 3799.
https://stars.library.ucf.edu/facultybib2010/3799
Comments
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