High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios
Abbreviated Journal Title
3-DIMENSIONAL MICROFABRICATION; PHOTOPOLYMERIZATION; LITHOGRAPHY; POLY(DIMETHYLSILOXANE); PHOTORESIST; SURFACES; SYSTEMS; DESIGN; SU-8; Biochemical Research Methods; Chemistry, Multidisciplinary; Nanoscience; & Nanotechnology
We demonstrate the use of high-speed, multiphoton absorption polymerization ( MAP) for the fabrication of large-area microfluidic master structures. High-speed fabrication in SU8 without laser-induced damage is made possible by the use of a novel photoacid generator with a high two-photon-absorption cross-section. Master structures fabricated with MAP can be used to produce polydimethylsiloxane microchannels with high aspect ratios and/or arbitrary cross-sections. Microchannels with different cross-sections and heights can be combined readily in a single device. This fabrication technique significantly increases the diversity of channel architectures available for microfluidic devices.
Lab on a Chip
"High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios" (2010). Faculty Bibliography 2010s. 394.