Title

Wireless passive polymer-derived SiCN ceramic sensor with integrated resonator/antenna

Authors

Authors

Y. Li; Y. X. Yu; H. S. San; Y. S. Wang;L. A. An

Comments

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Abbreviated Journal Title

Appl. Phys. Lett.

Keywords

HIGH-TEMPERATURE; PRESSURE SENSOR; SILICOALUMINUM CARBONITRIDE; HARSH; ENVIRONMENT; PIEZORESISTIVITY; FABRICATION; OXIDATION; RESIST; Physics, Applied

Abstract

This paper presents a passive wireless polymer-derived silicon carbonitride (SiCN) ceramic sensor based on cavity radio frequency resonator together with integrated slot antenna. The effect of the cavity sensor dimensions on the Q-factor and resonant frequency is investigated by numerical simulation. A sensor with optimal dimensions is designed and fabricated. It is demonstrated that the sensor signal can be wirelessly detected at distances up to 20 mm. Given the high-temperature stability of the SiCN, the sensor is very promising for high-temperature wireless sensing applications. (C) 2013 AIP Publishing LLC.

Journal Title

Applied Physics Letters

Volume

103

Issue/Number

16

Publication Date

1-1-2013

Document Type

Article

Language

English

First Page

5

WOS Identifier

WOS:000326148700088

ISSN

0003-6951

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