Title

Laser-plasma source parameters for Kr, Gd, and Tb ions at 6.6 nm

Authors

Authors

M. Masnavi; J. Szilagyi; H. Parchamy;M. C. Richardson

Comments

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Abbreviated Journal Title

Appl. Phys. Lett.

Keywords

Physics, Applied

Abstract

There is increasing interest in extreme-ultraviolet (EUV) laser-based lamps for sub-10-nm lithography operating in the region of 6.6 nm. A collisional-radiative model is developed as a post-processor of a hydrodynamic code to investigate emission from resonance lines in Kr, Gd, and Tb ions under conditions typical for mass-limited EUV sources. The analysis reveals that maximum conversion efficiencies of Kr occur at 5 x 10(10) W/cm(2), while for Gd and Tb it was similar or equal to 0.9%/2 pi sr for laser intensities of (2-5) x 10(12) W/cm(2). (C) 2013 AIP Publishing LLC [http://dx.doi.org/10.1063/1.4802789]

Journal Title

Applied Physics Letters

Volume

102

Issue/Number

16

Publication Date

1-1-2013

Document Type

Article

Language

English

First Page

3

WOS Identifier

WOS:000318269300110

ISSN

0003-6951

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