Title

Effect of Pyrolysis Temperature on the Structure and Conduction of Polymer-Derived SiC

Authors

Authors

K. W. Wang; B. S. Ma; X. Q. Li; Y. G. Wang;L. N. An

Comments

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Abbreviated Journal Title

J. Am. Ceram. Soc.

Keywords

AMORPHOUS-CARBON; SILICON OXYCARBIDES; CERAMICS; SPECTRA; FILMS; PIEZORESISTIVITY; SPECTROSCOPY; STRESS; SP(3); MEMS; Materials Science, Ceramics

Abstract

We studied the electric conductivity and structure of polymer-derived carbon-rich amorphous SiC pyrolyzed at different temperatures. The conductivity of the material increased drastically with pyrolysis temperature followed an Arrhenius relationship with the activation energy of similar to 3.4 eV. Raman and X-ray photoelectron spectroscopy analysis revealed that the order of free carbon phase increased with pyrolysis temperature, accompanied by sp(3)-> sp(2) transition. The activation energy for such a structure change was 3.1-3.8 eV, which is close to that for the conductivity change. We thus believe that the increase in the conductivity was mainly due to the increase in conductivity of the free carbon phase.

Journal Title

Journal of the American Ceramic Society

Volume

97

Issue/Number

7

Publication Date

1-1-2014

Document Type

Article

Language

English

First Page

2135

Last Page

2138

WOS Identifier

WOS:000338126800023

ISSN

0002-7820

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