Authors

A. Portavoce; L. Chow;J. Bernardini

Comments

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"This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in the linked citation and may be found originally at Applied Physics Letters."

Abbreviated Journal Title

Appl. Phys. Lett.

Keywords

diffusion; elemental semiconductors; germanium; grain boundaries; grain; boundary diffusion; nanostructured materials; semiconductor; heterojunctions; silicon; POLYCRYSTALLINE; Physics, Applied

Abstract

The influence of triple-junctions on experimental Ge diffusion profiles (850-1000 degrees C) in nanocrystalline Si is investigated using three-dimensional finite element simulations. We found that triple-junction diffusion is not negligible in nanocrystalline Si made of 40 nm wide grains. Ge triple-junction diffusion coefficient follows the Arrhenius law 5.72x10(4) exp(-3.24 eV/kT)cm(2) s(-1). It is approximately 4.7x10(2) times higher than grain boundary diffusion coefficient, even though diffusion in triple-junction and in grain boundary exhibits similar activation energy.

Journal Title

Applied Physics Letters

Volume

96

Issue/Number

21

Publication Date

1-1-2010

Document Type

Article

Language

English

First Page

3

WOS Identifier

WOS:000278183200100

ISSN

0003-6951

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