An angular pumped and emitting capillary(APEC) discharge light source having a blocking electrode installed on the axis of the capillary just beyond the end of the capillary bore. Thus, the emitting region occurs in an angular fashion between the end of the capillary and the blocking electrode. The blocking electrode prevents debris generated within the capillary from being expelled onto collecting optics for the discharge source. A second version shapes the blocking electrode into a trap so that emitted debris will be collected within the trap. Alternatively, the trap can be a collector separate and apart from the electrodes of the light source. The capillary bore and electrode configuration allow for emissions to be enhanced by placing the electrode in front of the outlet to the capillary bore. A still another version has a discharge source without a capillary bore where gas flows through a first electrode to a space in front of a second electrode to generate a discharge therebetween
Application Serial Number
Agency: Extreme Ultraviolet (EUV), LLC
Assignee at Issuance
College of Optics and Photonics
Assignee at Filing
Nonprovisional Application Record
Silfvast, William and Shimkaveg, Gregory, "Debris Blocker/ Collector and Emission Enhancer for Discharge Sources" (2001). UCF Patents. 105.