The nanofabrication of a hydrogen nanosensor from single ZnO branched nanorods using in-situ lift-out technique, performed in the chamber of a focused ion beam (FIB) system is disclosed. A self-assembled ZnO branched nanorod has been grown by a cost-effective and fast synthesis route using an aqueous solution deposition method and rapid thermal processing. The properties of the ZnO nanorod structures were analyzed by X-ray difhction, scanning electron microscopy, energy dispersion X-ray spectroscopy, transmission electron microscopy and micro-Raman spectroscopy. High quality ZnO nanorods were obtained with a 90% success rate for building nanodevices. The fabricated nanosensor can gauge 150 ppm hydrogen gas in the air at room temperature. The nanosensor has selectivity for other gases such as oxygen, methane, carbon monoxide and liquid propane gas. The single ZnO branched nanorod sensor also operates at low power of less than 5 microwatts.
US 8,263,002 B1
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College of Sciences
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Nonprovisional Application Record
Chow, Lee; Chia, Guangyu; and Lupan, Oleg, "Fabrication of ZnO Nanorod-Based Hydrogen Gas Nanosensor" (2012). UCF Patents. 181.