Abstract

The nanofabrication of a hydrogen nanosensor from single ZnO branched nanorods using in-situ lift-out technique, performed in the chamber of a focused ion beam (FIB) system is disclosed. A self-assembled ZnO branched nanorod has been grown by a cost-effective and fast synthesis route using an aqueous solution deposition method and rapid thermal processing. The properties of the ZnO nanorod structures were analyzed by X-ray difhction, scanning electron microscopy, energy dispersion X-ray spectroscopy, transmission electron microscopy and micro-Raman spectroscopy. High quality ZnO nanorods were obtained with a 90% success rate for building nanodevices. The fabricated nanosensor can gauge 150 ppm hydrogen gas in the air at room temperature. The nanosensor has selectivity for other gases such as oxygen, methane, carbon monoxide and liquid propane gas. The single ZnO branched nanorod sensor also operates at low power of less than 5 microwatts.

Document Type

Patent

Patent Number

US 8,263,002 B1

Application Serial Number

12/465,043

Issue Date

9-11-2012

Current Assignee

UCFRF

Assignee at Issuance

UCFRF

College

College of Sciences

Department

Physics

Allowance Date

2-15-2012

Filing Date

6-13-2009

Assignee at Filing

UCFRF

Filing Type

Nonprovisional Application Record

Donated

no

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