Title

High Efficiency Collector for Laser Plasma EUV Source - (EP)

Abstract

Collector optics for an EUV radiation source for collecting EUV radiation. The collector optics includes an elliptical dish reflector where light generated at a focal point of the reflector and is directed to a collection location. A frustal annual reflector is positioned around an outer edge of the dish reflector to collect more of the EUV radiation that may otherwise be lost. The radiation reflected by the annual reflector is directed to a center axicon reflector positioned between the focal point of the dish reflector and the collection location to redirect the radiation reflected by the annual reflector to be within a predetermined collection angle.

Document Type

Patent

Patent Number

EP 1 475 807 B1

Application Serial Number

03 026 822.1

Issue Date

12-31-2008

Current Assignee

UCFRF

Assignee at Issuance

UCFRF

Allowance Date

7-9-2008

Filing Date

11-20-2003

Assignee at Filing

Agency: Northrop Grumman Corporation

Filing Type

Foreign Filing Record

Donated

yes

Link to Patent
PDF on Google Patents

Share

COinS