Title

Linear Filament Array Sheet for EUV Production (Europe)

Abstract

An EUV radiation source that generates a sheet of a liquid target material that has a width that matches the desired laser spot size for good conversion efficiency and a thickness that matches the laser beam/target interaction depth. The EUV source includes a reservoir containing a pressurized cryogenic liquid target material, such as liquid Xenon. The reservoir also includes an array of closely spaced orifices. The liquid target material is forced through the orifices into a vacuum chamber as separated liquid stream filaments of the target material that define the sheet. The liquid streams freeze to form an array of frozen target filaments. A laser beam is directed to a target area in the vacuum chamber where it irradiates the stream of filaments to create a plasma that emits EUV radiation.

Document Type

Patent

Patent Number

EP 1 367 445

Application Serial Number

03 011 758.4-2208

Issue Date

12-29-2010

Current Assignee

UCFRF

Assignee at Issuance

UCFRF

Allowance Date

7-20-2010

Filing Date

5-23-2003

Assignee at Filing

Agency: Northrop Grumman Corporation

Filing Type

Foreign Filing Record

Donated

yes

Link to Patent
PDF on Google Patents

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