Abstract

Compact, high performance, scanning heterodyne optical interferometers for interferometric phase-based measurement and a host of other applications are introduced. An in-line, almost common-path optical interferometer design offers robustness to externally induced phase noise via mechanical vibrations, thermal effects, and other environmental effects. Several instrument designs are disclosed for both transmissive and reflective interferometry. These interferometers use acousto-optic devices or Bragg cells to implement rapid (e.g., <50 >.mu.s/scan spot) optical scanning of a test medium. Although the read optical beam scans a given test region, the double Bragg diffraction optical design of the instrument makes the final interfering output beams stationary on the two high speed photo-detectors used for radio frequency signal generation via heterodyne detection. One photo detector acts as the fixed phase reference, while another fixed photo detector picks up the test medium phase informat

Document Type

Patent

Patent Number

US 5,694,216

Application Serial Number

08/636,506

Issue Date

12-2-1997

Current Assignee

UCFRF

Assignee at Issuance

UCFRF

College

College of Optics and Photonics

Department

CREOL

Allowance Date

4-1-1997

Filing Date

4-25-1996

Assignee at Filing

UCFRF

Filing Type

Nonprovisional Application Record

Donated

no

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