Title

Target Steering system for EUV droplet generators (GERMANY)

Abstract

An EUV radiation source that employs a steering device for steering a stream of droplets generated by a droplet generator so that the droplet are directed towards a target location to be vaporized by a laser beam. The direction of the stream of droplets is sensed by a sensing device. The sensing device sends a signal to an actuator that controls the orientation of the steering device so that the droplets are directed to the target location.

Document Type

Patent

Patent Number

DE 603 11 350

Application Serial Number

60311350.8-08

Issue Date

7-12-2007

Current Assignee

Agency: University of Central Florida Foundation, Inc.

Assignee at Issuance

Agency: University of Central Florida Foundation, Inc.

Filing Date

5-20-2003

Assignee at Filing

Agency

Filing Type

Foreign Filing Record

Donated

yes

Link to Patent

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