A nozzle for a laser-plasma EUV radiation source that provides thermal isolation between the nozzle body and the target material flowing therethrough. A target delivery tube is provided that extends through the nozzle body. The delivery tube has an expansion aperture positioned behind an exit collimator of the nozzle body. The delivery tube is made of a low thermal conductivity material, such as stainless steel, and is in limited contact with the nozzle body so that heating of the nozzle body from the plasma does not heat the liquid target material being delivered through the delivery tube. The expansion aperture has a smaller diameter than the exit collimator.
US 6,657,213 B2
Application Serial Number
Assignee at Issuance
Agency: Northrop Grumman Corporation
Assignee at Filing
Agency: TRW Inc.
Nonprovisional Application Record
McGregor, Roy; Orsini, Rocco; and Petach, Michael, "High Temperature EUV Source Nozzle" (2003). UCF Patents. 715.