An EUV radiation source that generates a sheet of a liquid target material that has a width that matches the desired laser spot size for good conversion efficiency and a thickness that matches the laser beam/target interaction depth. The EUV source includes a reservoir containing a pressurized cryogenic liquid target material. such as liquid Xenon. The reservoir also includes an array of closely spaced orifices into a vacuum chamber as separated liquid stream filaments of the target material that define the sheet. The liquid streams freeze to form an array of frozen target filaments. A laser beam is directed to a target area in the vacuum chamber where it irradiates the stream of filaments to create a plasma that emits EUV radiation.
US 6,744,851 B2
Application Serial Number
Assignee at Issuance
Agency: Northrop Grumman Corporation
Assignee at Filing
Agency: TRW Inc.
Nonprovisional Application Record
Orsini, Rocco and Petach, Michael, "Linear Filament Array Sheet for EUV Production." (2004). UCF Patents. 729.