Abstract

This invention relates to an extreme ultraviolet lithography system that utilizes thin film protective coatings to protect a plurality of hardware components, located near a laser-produced light source, from the erosive effects of energetic particles emitted by the laser-produced light source.

Document Type

Patent

Patent Number

US 6,479,830 B1

Application Serial Number

09/704,414

Issue Date

11-12-2002

Current Assignee

Agency: University of Central Florida Foundation, Inc.

Assignee at Issuance

Agency: TRW Inc.

Allowance Date

7-12-2002

Filing Date

11-1-2000

Assignee at Filing

Agency: TRW Inc.

Filing Type

Nonprovisional Application Record

Donated

yes

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