A gas jet nozzle for an extreme-ultraviolet light source, including a housing having a front and back. The housing is coupleable to a primary gas source and a secondary gas source and is adapted to expel primary has and secondary gas from the housing front. The housing has a gas=expelling primary channel located centrally within the housing and a gas-expelling secondary channel proximate the primary channel. The primary channel may be circular and a secondary channel may be annular, surrounding the primary channel. A secondary gas stream expelled from the secondary channel restricts the lateral expansion of a primary gas stream expelled from the primary channel, optimizing gas jet properties and reducing heating and erosion of the nozzle.
US 6,661,018 B1
Application Serial Number
Agency: University of Central Florida Foundation, Inc.
Assignee at Issuance
Agency: Northrop Grumman Corporation
Assignee at Filing
Agency: TRW Inc.
Nonprovisional Application Record
McGregor, Roy and Clendening, Charles, "Shroud Nozzle for Gas Jet Control in an Extreme Ultraviolet Light" (2003). UCF Patents. 781.