Abstract

A gas jet nozzle for an extreme-ultraviolet light source, including a housing having a front and back. The housing is coupleable to a primary gas source and a secondary gas source and is adapted to expel primary has and secondary gas from the housing front. The housing has a gas=expelling primary channel located centrally within the housing and a gas-expelling secondary channel proximate the primary channel. The primary channel may be circular and a secondary channel may be annular, surrounding the primary channel. A secondary gas stream expelled from the secondary channel restricts the lateral expansion of a primary gas stream expelled from the primary channel, optimizing gas jet properties and reducing heating and erosion of the nozzle.

Document Type

Patent

Patent Number

US 6,661,018 B1

Application Serial Number

09/559,303

Issue Date

12-9-2003

Current Assignee

Agency: University of Central Florida Foundation, Inc.

Assignee at Issuance

Agency: Northrop Grumman Corporation

Allowance Date

8-21-2003

Filing Date

4-25-2000

Assignee at Filing

Agency: TRW Inc.

Filing Type

Nonprovisional Application Record

Donated

yes

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