Novel micro electro mechanical systems (MEMS)-based sensors for use in ultra-high temperature environments are disclosed. The MEMS-based sensors are derived from a class of polymer-derived ceramics selected from the group consisting of SiCN, SiBCN and SiAlCN. The materials of construction are such that, the sensors are capable of accurate, real-time, on-line and in-situ monitoring, suppression of combustion oscillations and detailed measurements in operating structures that have temperatures of from about 1500.degree. K to about 2000.degree. K, extreme pressures/turbulence and harsh chemical off gases. When the novel sensors are mounted on a hot gas path wall, such as, at a combustor exit, there can be a continuous monitoring of pressure pulses/oscillations, wall shear stress, temperature and surface heat flux.
US 7,338,202 B1
Application Serial Number
Assignee at Issuance
College of Engineering and Computer Science (CECS)
Mechanical and Aerospace Engineering
Assignee at Filing
Nonprovisional Application Record
Kapat, Jayanta; An, Linan; and Bharani, Sanjeev, "Ultra-High Temperature Micro-Electro-Mechanical Systems (MEMS)-Based Sensors" (2008). UCF Patents. 797.