Investigation of silicon nitride films by pecvd and applications to saw devices
Doctor of Philosophy (Ph.D.)
College of Engineering
Length of Campus-only Access
Doctoral Dissertation (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Lee, Kwang Ryul, "Investigation of silicon nitride films by pecvd and applications to saw devices" (1992). Retrospective Theses and Dissertations. 4459.