Keywords
Mems, resonator, filter, quality factor, piezoelectric, diamond, silicon, thin film, micro fabrication, resonant system
Abstract
The main focus of this dissertation is to characterize and improve the performance of thin-film piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior acoustic properties of a substrate. The use of lateral-mode TPoS designs allows for fabrication of dispersed-frequency filters on a single substrate, thus significantly reducing the size and manufacturing cost of devices. TPoS filters also offer a lower temperature coefficient of frequency, and better power handling capability compared to rival technologies all in a very small footprint. Design and fabrication process of the TPoS devices is discussed. Both silicon and diamond substrates are utilized for fabrication of TPoS devices and results are compared. Specifically, the superior acoustic properties of nanocrystalline diamond in scaling the frequency and energy density of the resonators is highlighted in comparison with silicon. The performance of TPoS devices in a variety of applications is reported. These applications include lateral-mode TPoS filters with record low IL values (as low as 2dB) and fractional bandwidth up to 1%, impedance transformers, very low phase noise oscillators, and passive wireless temperature sensors.
Notes
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Graduation Date
2015
Semester
Fall
Advisor
Abdolvand, Reza
Degree
Doctor of Philosophy (Ph.D.)
College
College of Engineering and Computer Science
Department
Electrical Engineering and Computer Engineering
Degree Program
Electrical Engineering
Format
application/pdf
Identifier
CFE0005945
URL
http://purl.fcla.edu/fcla/etd/CFE0005945
Language
English
Release Date
December 2015
Length of Campus-only Access
None
Access Status
Doctoral Dissertation (Open Access)
Subjects
Dissertations, Academic -- Engineering and Computer Science; Engineering and Computer Science -- Dissertations, Academic
STARS Citation
Fatemi, Hedy, "Performance optimization of lateral-mode thin-film piezoelectric-on-substrate resonant systems" (2015). Electronic Theses and Dissertations. 1367.
https://stars.library.ucf.edu/etd/1367