Abstract
In this thesis, a high-frequency resonant accelerometer is presented. This novel sensor was designed to operate in 10's of MHz frequency range utilizing an out-of-plane capacitive mechanism for acceleration sensing. The sensor is comprised of a 2-port RF MEMS piezoelectric resonator, operating at 27MHz, and a Capacitive Mass-spring structure. One of the resonator ports is electrically connected to the variable capacitor in the mass-spring structure. The acceleration is measured utilizing a piezoelectric stiffening mechanism, where a change in the termination impedance of a piezoelectric resonant body would result in a shift in the resonance frequency of the resonator. The acceleration is extracted from the frequency-modulated output signal of the resonator. The sensors were fabricated on a silicon-on-insulator wafer coated with a thin film of sputtered aluminum nitride as the piezoelectric transducer. Initial test results show a ~600Hz shift in resonance frequency in response to ±1g of acceleration (~300Hz/g sensitivity).
Notes
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Graduation Date
2021
Semester
Summer
Advisor
Abdolvand, Reza
Degree
Master of Science in Electrical Engineering (M.S.E.E.)
College
College of Engineering and Computer Science
Department
Electrical and Computer Engineering
Degree Program
Electrical Engineering
Format
application/pdf
Identifier
CFE0009133; DP0026466
URL
https://purls.library.ucf.edu/go/DP0026466
Language
English
Release Date
February 2023
Length of Campus-only Access
1 year
Access Status
Masters Thesis (Open Access)
STARS Citation
Todi, Ankesh, "Fabrication of High-Frequency Piezoelectric Resonant Micro-Accelerometers based on Capacitive Loading Effect" (2021). Electronic Theses and Dissertations, 2020-. 1162.
https://stars.library.ucf.edu/etd2020/1162