Abstract

In this thesis, a high-frequency resonant accelerometer is presented. This novel sensor was designed to operate in 10's of MHz frequency range utilizing an out-of-plane capacitive mechanism for acceleration sensing. The sensor is comprised of a 2-port RF MEMS piezoelectric resonator, operating at 27MHz, and a Capacitive Mass-spring structure. One of the resonator ports is electrically connected to the variable capacitor in the mass-spring structure. The acceleration is measured utilizing a piezoelectric stiffening mechanism, where a change in the termination impedance of a piezoelectric resonant body would result in a shift in the resonance frequency of the resonator. The acceleration is extracted from the frequency-modulated output signal of the resonator. The sensors were fabricated on a silicon-on-insulator wafer coated with a thin film of sputtered aluminum nitride as the piezoelectric transducer. Initial test results show a ~600Hz shift in resonance frequency in response to ±1g of acceleration (~300Hz/g sensitivity).

Notes

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Graduation Date

2021

Semester

Summer

Advisor

Abdolvand, Reza

Degree

Master of Science in Electrical Engineering (M.S.E.E.)

College

College of Engineering and Computer Science

Department

Electrical and Computer Engineering

Degree Program

Electrical Engineering

Format

application/pdf

Identifier

CFE0009133; DP0026466

URL

https://purls.library.ucf.edu/go/DP0026466

Language

English

Release Date

February 2023

Length of Campus-only Access

1 year

Access Status

Masters Thesis (Campus-only Access)

Restricted to the UCF community until February 2023; it will then be open access.

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