In this thesis, a high-frequency resonant accelerometer is presented. This novel sensor was designed to operate in 10's of MHz frequency range utilizing an out-of-plane capacitive mechanism for acceleration sensing. The sensor is comprised of a 2-port RF MEMS piezoelectric resonator, operating at 27MHz, and a Capacitive Mass-spring structure. One of the resonator ports is electrically connected to the variable capacitor in the mass-spring structure. The acceleration is measured utilizing a piezoelectric stiffening mechanism, where a change in the termination impedance of a piezoelectric resonant body would result in a shift in the resonance frequency of the resonator. The acceleration is extracted from the frequency-modulated output signal of the resonator. The sensors were fabricated on a silicon-on-insulator wafer coated with a thin film of sputtered aluminum nitride as the piezoelectric transducer. Initial test results show a ~600Hz shift in resonance frequency in response to ±1g of acceleration (~300Hz/g sensitivity).
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Master of Science in Electrical Engineering (M.S.E.E.)
College of Engineering and Computer Science
Electrical and Computer Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Todi, Ankesh, "Fabrication of High-Frequency Piezoelectric Resonant Micro-Accelerometers based on Capacitive Loading Effect" (2021). Electronic Theses and Dissertations, 2020-. 1162.