Title

Velocity Characterization Of Particulate Debris From Laser-Produced Plasmas Used For Extreme-Ultraviolet Lithography

Authors

Authors

H. A. Bender; D. Oconnell;W. T. Silfvast

Comments

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Abbreviated Journal Title

Appl. Optics

Keywords

EXTREME-ULTRAVIOLET LITHOGRAPHY; LASER-PRODUCED PLASMAS; PLASMA DEBRIS; RAY PROJECTION LITHOGRAPHY; Optics

Abstract

Debris from laser-produced plasmas created with solid Sn and Au targets has been characterized according to speed and particulate size. Conditions for the experiments were those appropriate for producing an optimum laser-produced plasma emission at 13.5 nm for use in extreme-ultraviolet lithography. Results in the form of histogram data show that the speed distribution of the debris particulates is quite varied and in general exhibits an upper limit of similar to 640 m/s. In the case of Sn a peak in the velocity distribution is observed near 300 m/s. Small particulates, of the order of 1 mu m or less, constitute the majority of the particulate emission in both materials. The implications for debris reduction based on the measurements are also discussed.

Journal Title

Applied Optics

Volume

34

Issue/Number

28

Publication Date

1-1-1995

Document Type

Article

Language

English

First Page

6513

Last Page

6521

WOS Identifier

WOS:A1995RW22700028

ISSN

0003-6935

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